ACS200 Gen3 200mm Automated Coater & Developer     

Versatile and reliable: the ACS200 Gen3 is the perfect coater and developer solution for both R&D and high-volume manufacturing of 100 mm to 200 mm wafers. Thanks to its modular architecture, the platform easily adapts to your specific needs, ensuring seamless scalability and stable operations.

The flexible solution for every scale
With robust automation and flexible modules, the ACS200 Gen3 ensures reliable processing for both research and high-volume production. High repeatability guarantees consistent results and yield, while its quality design minimizes downtime and adapts to your specific needs.

The coater for every need
From Redistribution Layer (RDL) to Microelectromechanical System (MEMS) and beyond, the ACS200 Gen3 handles diverse requirements with equally high quality. Whether thin or thick resists or different developer media – expect perfect results every time.