AS8 Manual Spray Coater for High Topographies

Patterning across challenging topographies: the AS8 manual spray coater is the ideal solution for R&D and low-volume production of substrates up to 200 mm and square substrates up to 6″ edge length. The compact system combines smart usability with SUSS coating technology for uniform, reproducible coatings.

Consistent, reliable coating – on any topography
The AS8 provides uniform, conformal resist deposition over even the most demanding 3D structures. Seamlessly integrate programmable spray and cleaning parameters, simplify complex coating and enhance yield – all this in a compact footprint designed for R&D and low-volume manufacturing excellence.

Fully configurable coating performance
The AS8 is engineered for flexibility and precision at the substrate level especially for research and pilot production. The sophisticated resist supply system and programmable recipes enable tailored process control across all common wafer and substrate formats and seamless future scaling.